DSA0098291.pdf by TriQuint Semiconductor
- 0.25-µm mmW pHEMT 3MI Process Data Sheet PROTECTIVE OVERCOAT 4.0 µm METAL 2 2.0 µm METAL 1 2000 Å NITRIDE 2 MIM METAL 500 Å NITRIDE 1 0.75 µm METAL 0 TaN RESISTOR 500 Å NITRIDE 0 T-GATE
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