DSA00122431.pdf
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Silicon Micromachined Microphone Chip at Siemens
A. Dehé, R. Aigner*, T. Bever, K.-G. Oppermann*, E. Pettenpaul, S. Schmitt and H.-J. Timme
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Siemens AG, Semiconductor Group, HL GS SNS, Balanstr.
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