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    DSA00122431.pdf

    • Silicon Micromachined Microphone Chip at Siemens A. DehĂ©, R. Aigner*, T. Bever, K.-G. Oppermann*, E. Pettenpaul, S. Schmitt and H.-J. Timme * Siemens AG, Semiconductor Group, HL GS SNS, Balanstr.
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