DSASW00419401.pdf by X-FAB Semiconductor Foundries

Partial File Text MEMS Process Surface Micromachining Process for Inertial Sensors MIXED-SIGNAL FOUNDRY EXPERTS XM-SC Process Schematic cross section TC pad Metal line Top cap (TC) Sensor pad G
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finger pressure sensor Inertial Sensor Inertial sensors mems gyro MEMS gyro sensor MEMS pressure sensor mems pressure sensor structure MEMS pressure silicon seismic sensor sem 2005 wafer sensors