DSASW00419403.pdf by X-FAB Semiconductor Foundries

Partial File Text MEMS Process Bulk Micromachining Technology for Discrete Relative Pressure Sensors MIXED-SIGNAL FOUNDRY EXPERTS XM-BP XM-BP Technology Schematic cross section Process - Bulk micromachini
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0 to 10 bar analog pressure sensor Discrete relative pressure sensors mems integrated sensor pressure MEMS pressure sensor pressure sensor Relative Pressure Sensor Relative Pressure Sensors